SYSTEM AND METHOD FOR ABSORBANCE MODULATION LITHOGRAPHY
摘要
A lithography system is disclosed that provides an array of areas of imaging electromagnetic energy that are directed toward a recording medium. The reversible contrast-enhancement material is disposed between the recording medium and the array of areas of imaging electromagnetic energy.
申请公布号
WO2007084279(A1)
申请公布日期
2007.07.26
申请号
WO2007US00457
申请日期
2007.01.05
申请人
MASSACHUSETTS INSTITUTE OF TECHNOLOGY;MENON, RAJESH;SMITH, HENRY, I.
