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经营范围
发明名称
Sputterbeschichtungsstation, Verfahren zur Herstellung sputterbeschichteter Werkstücke und Verwendung der Station oder des Verfahrens zur Beschichtung scheibenförmiger Substrate
摘要
申请公布号
DE19617155(B4)
申请公布日期
2007.07.26
申请号
DE19961017155
申请日期
1996.04.29
申请人
OC OERLIKON BALZERS AG
发明人
HAAG, WALTER
分类号
C23C14/34;C23C14/22;C23C14/35;C23C14/56;H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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