| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a simple manufacturing method of a transparent conductive film with a high transmissivity and a low resistivity, a transparent conductive film with little absorption of visible light when the surface resistance is made 500-1,000Ω/sq. in thermally stable state, and furthermore a touch panel using the transparent conductive film. <P>SOLUTION: A target 3 made of zinc oxide containing aluminum oxide and a substrate 11 are arranged opposed to each other, and DC voltage with an input power of 8,000 W/m<SP>2</SP>or more is impressed between the target 3 and the substrate 11 in an inert gas atmosphere containing oxygen, and sputtering is made. Thereby, a transparent conductive film made of zinc oxide containing aluminum oxide is manufactured on the substrate 11. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
