| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam irradiation apparatus which reduces energy loss and can attain a large irradiation capacity by enhancing transmission efficiency of an irradiation window. SOLUTION: An orientation film of an inorganic substance such as graphite having a density lower than those of titanium and aluminum and capable of being made into a thin film having a thickness of 3-30μm is used for a window foil of the irradiation window. When it is insulator, a conductive film such as a very thin metal film is attached on the surface or a film is formed on a carbon sheet to obtain a function of an electrode, or a filler of a conductor such as carbon fiber and metal is added to the material to turn the film into a semiconductive film to attain conductance required by the window foil. Thus, the irradiation window capable of keeping the degree of vacuum, having a sufficient resistance to high temperature and having an excellent transmission efficiency is obtained, and is applied to the electron beam irradiation equipment excellent in efficiency. COPYRIGHT: (C)2007,JPO&INPIT
|
