REFLECTION-TYPE OPTICAL SENSOR AND SURFACE ROUGHNESS DETECTING METHOD OF MEASURING SURFACE

摘要

PROBLEM TO BE SOLVED: To provide a surface roughness measuring sensor, having high detection accuracy and low manufacturing cost. SOLUTION: The reflection-type optical sensor is equipped with a light-emitting element 2 for emitting light with a single wavelength and two light-detecting elements 3f and 3n having light-detecting sensitivity with respect to the emitted light of the light-emitting element 2. The light-detecting elements 3f and 3n are arranged so that the optical axes Xdfand Xdnof them become almost parallel. The light-emitting element 2 and the light-detecting element 3f are respectively arranged so as to cross each other at the position Pxf, where the optical axes Xeand Xdfof them are separated from the reflection-type optical sensor 1 by a predetermined distance Fa, and the light-emitting element 2 and the light-detecting element 3n are respectively arranged so as to cross each other, at a position Pxnwhere the optical axes Xeand Xdnof them are separated from the reflection-type optical sensor 1 by a predetermined distance Ne. The light-detecting and light-emitting optical axis cross point Pxf, where the optical axis Xeof the light-emitting element 2 and the optical axis Xdfof the light-detecting element 3f cross each other, is positioned at a measuring point S, and the reflection-type optical sensor 1 is set so that the optical axis Xeof the light-emitting element 2 and the optical axis Xdfof the light-detecting element 3f become the same angleθwith respect to the normal SN at the measuring point S. COPYRIGHT: (C)2007,JPO&INPIT