发明名称 |
Micro-electro mechanical systems switch and method of fabricating the same |
摘要 |
A MEMS switch and a method of manufacturing the same are disclosed. The MEMS switch includes: a substrate including a trench, a ground line and a signal line having an opened portion; a moving plate separated from the substrate at a predetermined space and including a contact member for connecting an electrode plate and the opened portion and having a deep corrugate to insert the trench; and a supporting member for supporting the moving plate. Such a MEMS switch prevents the thermal expansion and the stiction problem.
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申请公布号 |
US2007170460(A1) |
申请公布日期 |
2007.07.26 |
申请号 |
US20060440863 |
申请日期 |
2006.05.24 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
LEE JAE W.;JE CHANG H.;KANG SUNG W. |
分类号 |
H01L29/74;H01L29/32;H01L31/111 |
主分类号 |
H01L29/74 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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