| 发明名称 |
High density capacitor for integrated circuit technologies |
| 摘要 |
An apparatus and method are provided of forming a capacitor including carbon nanotubes.
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| 申请公布号 |
US2007171594(A1) |
申请公布日期 |
2007.07.26 |
| 申请号 |
US20060640691 |
申请日期 |
2006.12.18 |
| 申请人 |
BUDNIK MARK M;RAYCHOWDHURY ARIJIT;BANSAL ADITYA;ROY KAUSHIK |
发明人 |
BUDNIK MARK M.;RAYCHOWDHURY ARIJIT;BANSAL ADITYA;ROY KAUSHIK |
| 分类号 |
H01G4/06 |
主分类号 |
H01G4/06 |
| 代理机构 |
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