A METHOD OF FABRICATING A COMPOSITE SUBSTRATE WITH IMPROVED ELECTRICAL PROPERTIES

摘要

A method for fabricating a composite substrate is provided to produce the composite substrate having at least one insulating layer having improved electrical properties between a support substrate and an active layer. An insulating layer(32) is formed on a source substrate, and an insulating layer(31) is formed on a support substrate(1). The insulating layers are subjected to selective recovery heat treatment. Any one of a front surface of the insulating layer of the source substrate and a front surface of the support substrate or a front surface of the insulating layer of the support substrate is subjected to plasma activation process. A back portion of the source substrate is lifted off from the bonded substrate to prepare a composite substrate.