| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample holder capable of processing and observing a sample from a plurality of directions. SOLUTION: The purpose stated above can be achieved by providing the sample holder for charged particle beam device with a mechanism capable of directing the sample stand fitted to the holder in optional angle and a fine movement device. By the above mechanism, a processing by using an ion beam, and observation of secondary electron image in optional direction through an electron microscope are made possible without taking out a fine piece of sample from the sample stand. COPYRIGHT: (C)2007,JPO&INPIT
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