| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multilayer-film reflector capable of removing a multilayer film from a substrate without spending time and costs and regenerating a new multilayer film, and achieving a desired reflection factor. <P>SOLUTION: In the multilayer-film reflector, the multilayer film 103 is formed on a substrate 101, and at least one layer in the multilayer film contains an alkaline metal or an alkaline earth metal. When dissolving the multilayer film and then peeling it from the substrate; the alkaline metal and the alkaline earth metal in the multilayer film are dissolved first, and the film becomes coarse for enabling the solution to permeate easily, thus accelerating the dissolution and peeling of the multilayer film. Consequently, the multilayer film can be peeled from the substrate quickly. By forming a new multilayer film on the substrate, the multilayer-film reflector can be regenerated efficiently. Also, since the surface roughness of the substrate can be maintained, the reflection factor of the regenerated multilayer-film reflector does not decrease. <P>COPYRIGHT: (C)2007,JPO&INPIT |
