| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact free from color unevenness, and an aluminum nitride circuit board and a module using it. <P>SOLUTION: The aluminum nitride compact is made by using aluminum nitride powder treated for oxidization in the air at 500-700°C for 6 h or less as a raw material, where aluminum nitride synthesized by a direct nitriding method is used. The aluminum nitride circuit board is made by using the aluminum nitride sintered compact and the module is made by using the aluminum nitride circuit board. <P>COPYRIGHT: (C)2007,JPO&INPIT |
