| 摘要 |
PROBLEM TO BE SOLVED: To provide a length measuring instrument performing alignment on a standard scale in a short period of time. SOLUTION: This length measuring instrument is equipped with a movable stage 2 for thereon placing the standard scale 3 and a laser interference length measuring instrument LI for detecting the position of the movable stage 2. In this measuring instrument, microscopes 5 and 6 for severally detecting alignment marks on both ends of the standard scale 3 are disposed at different positions in the moving direction of the movable stage 2. COPYRIGHT: (C)2007,JPO&INPIT
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