| 摘要 |
PROBLEM TO BE SOLVED: To provide a decompression container and a decompression processing apparatus capable of surely preventing generation of particles caused by deformation of the container. SOLUTION: An O-ring 90 as a seal member is inserted into a groove 26 formed on an upper end face 21a of a container main body 21 surrounding an internal space of a load lock chamber 20, a spacer 91 having an approximately L-shaped cross section is disposed outside of the O-ring in a state of being partially inserted into the groove 26, and keeping a face at a L-shaped bent internal angular side closely into contact with from an inner wall face of the groove 26 to the upper end face 21a of the container main body 21. As the container main body 21 and a top board 22 are separated from each other by the spacer 91, contact of an angular portion 21b at an inner peripheral side of the container main body 21 and the top board 22 can be prevented even when the top board 22 is deflected in a state of reducing a pressure inside of the load lock chamber 20 to a high vacuum state. COPYRIGHT: (C)2007,JPO&INPIT
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