发明名称 Photosensitive polymer and photoresist composition having the same
摘要 A photosensitive polymer for a photoresist and a photoresist composition having the same are provided. The photosensitive polymer for a photoresist includes the repeating unit represented by the formula below: wherein R<SUB>1 </SUB>is a C<SUB>1</SUB>-C<SUB>20 </SUB>hydrocarbon group or a C<SUB>1</SUB>-C<SUB>20 </SUB>hetero hydrocarbon group including at least one hetero atom selected from the group consisting of nitrogen, fluorine and sulfur.
申请公布号 US2007172760(A1) 申请公布日期 2007.07.26
申请号 US20070655977 申请日期 2007.01.22
申请人 SAMSUNG ELECTRONICS CO. LTD 发明人 CHOI SANG-JUN;CHO HAN-KU
分类号 G03C1/00 主分类号 G03C1/00
代理机构 代理人
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