<p>A microphone having an optical component for converting the sound-induced motion of the diaphragm into an electronic signal using a diffraction grating. The microphone with inter-digitated fingers is fabricated on a silicon substrate using a combination of surface and bulk micromachining techniques. A 1mm x 2mm microphone diaphragm, made of polysilicon, has stiffeners and hinge supports to ensure that it responds like a rigid body on flexible hinges. The diaphragm is designed to respond to pressure gradients, giving it a first order directional response to incident sound. This mechanical structure is integrated with a compact optoelectronic readout system that displays results based on optical interferometry.</p>
申请公布号
WO2007084653(A2)
申请公布日期
2007.07.26
申请号
WO2007US01406
申请日期
2007.01.18
申请人
THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK;GEORGIA TECH RESEARCH CORP.;MILES, RONALD, N.;DEGERTEKIN, F., LEVENT