METHOD AND APPARATUS FOR CLEANING AND SURFACE CONDITIONING OBJECTS USING PLASMA

摘要

An apparatus for cleaning objects using plasma is disclosed. The apparatus includes a first plurality of elongated dielectric barrier members arranged adjacent each other; a second plurality of elongated dielectric barrier members arranged adjacent each other and stacked juxtaposed the first plurality of elongated dielectric barrier members; and a plurality of electrodes, each contained within, and extending substantially along the length of, respective ones of the first and second plurality of stacked elongated dielectric barrier members.