| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-frequency heat plasma apparatus which provides a low-temperature plasma flame having a wide uniform temperature range without having an accidental fire of a plasma torch. <P>SOLUTION: The plasma apparatus has a two-stage torch (quartz tube) 10 provided with a first torch 11 generating first plasma 1 and a second torch 21 generating second plasma 2. A diffuse gas discharge part 33 diffusing the plasma flame by discharging gas and a plasma flame diffusing means 31 having a buffer block 34 conflicting with the plasma flame to diffuse it are provided in a plasma flame. Thereby the plasma apparatus lowers the temperature of the plasma flame to widen the range of uniform temperature by diffusing the plasma flame. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
