发明名称 SUPPORTING STRUCTURE OF A HEATING ELEMENT, INSULATING STRUCTURE, HEATING DEVICE AND SUBSTRATE PROCESSING APPARATUS
摘要 To provide a heating element holding structure that prevents a pair of power feeding devices of the heating element from being short-circuited or deposited due to welding. This structure is composed of a heat insulating block 36 formed cylindrically by a heat insulating material, and a heating element 42 equipped with a pair of power feeding devices 45 and 46. In a heater unit with the heating element 42 at the inner side of a mounting groove 40 of the heat insulating block 36; a pair of power feeding devices 45 and 46 of the heating element 42 is held by an external insulator 52 and an inner insulator 55, and a partition wall 58 is built between the power feeding devices 45 and 46 of the inner insulator 55. In this way, even if the heating element 42 extends for heat expansion or deterioration with age, the partition wall 58 prevents a pair of power feeding devices 45 and 46 from contacting with each other, and consequently neither heating element short-circuit nor adhesion does not take place.
申请公布号 KR100742451(B1) 申请公布日期 2007.07.25
申请号 KR20050091919 申请日期 2005.09.30
申请人 发明人
分类号 H01L21/324 主分类号 H01L21/324
代理机构 代理人
主权项
地址