A MICRO REFORMER AND ITS MANUFACTURING METHOD

摘要

An improved fuel reformer which can obtain a high efficiency reforming effect by accurately securing an etching depth of catalytic filters, and can improve the power output density of the fuel cell by smoothly supplying a reforming gas while accomplishing the miniaturization of the fuel cell in the case that the fuel reformer is mounted on a fuel cell, and a manufacturing method of the fuel reformer are provided. A manufacturing method of a fuel reformer for a fuel cell comprises the steps of: providing a substrate(10) with a predetermined size; forming a mask(50) of compensation patterns(52) in channel regions of the substrate such that the compensation patterns have a gap(d) corresponding to a gap between catalytic filters; etching the substrate; depositing SiO2 onto the substrate; and etching SiO2 of the substrate to remove the substrate of channel portions and form channels(20). The compensation patterns are formed in the form of a castle wall whose thickness is thinner than the thickness of pillars of the catalytic filters, and a gap between the compensation patterns is equal to that between the pillars of the catalytic filters to impart the same load as an etching load of the catalytic filters to the channels.