发明名称 METHOD OF MANUFACTURING INSULATING TARGET MATERIAL
摘要 A method for manufacturing an insulating target material is provided to improve homogeneity and insulation capacity by mixing a first powder with a Si raw material and/or a solution of a Ge raw material. Oxides of A, B, and C elements are mixed with each other(S1), and then the mixture is pulverized to produce a first powder(S2). The first powder is mixed with a solution containing one or more out of a Si raw material and a Ge raw material(S3), and then a second powder is obtained from the mixture of the first powder and the solution(S4). The second powder is heat-treated and pulverized to produce a third powder(S5). The third powder is sintered(S6). The element is selected from Pb, Bi, Sr, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, and Lu. The B element is selected from Zr, Ti, V, Bi, W, and Hf. The C element is selected from Nb and Ta.
申请公布号 KR20070077080(A) 申请公布日期 2007.07.25
申请号 KR20070005076 申请日期 2007.01.17
申请人 SEIKO EPSON CORPORATION 发明人 OHASHI KOJI;KIJIMA TAKESHI;IWASHITA SETSUYA;HAMADA YASUAKI
分类号 H01L21/203 主分类号 H01L21/203
代理机构 代理人
主权项
地址