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发明名称
Method of forming a relaxed SiGe layer
摘要
申请公布号
EP1810320(A1)
申请公布日期
2007.07.25
申请号
EP20050797345
申请日期
2005.10.28
申请人
KONINKLIJKE PHILIPS ELECTRONICS N.V.
发明人
PAWLAK, BARTLOMIEJ, J.;MEUNIER-BEILLARD, P.
分类号
H01L21/20;H01L29/10
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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