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发明名称
METHOD AND SYSTEM FOR CLEANING A CHEMICAL MECHANICAL POLISHING PAD
摘要
申请公布号
KR100742452(B1)
申请公布日期
2007.07.25
申请号
KR20017014999
申请日期
2001.11.23
申请人
发明人
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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