| 摘要 |
A throttle valve having rotation angle measuring instrument and a chamber pressure controller having the same are provided to precisely adjust pressure in the chamber by measuring an actual rotation angle of a rotation plate of the throttle valve and to prevent processing error. A chamber pressure controller is installed in a chamber device. A camber(200) is connected to a reaction gas supplying pipe communicated with am reaction gas container(300). The chamber is connected to an exhaust pipe connected to a vacuum pump(400). In order to control pressure of the chamber, the chamber controller is provided to control an amount of the reaction gas introducing into the chamber and an amount of gas exhausted from the chamber. The chamber pressure controller includes throttle valves(100_a,100_b) and a control panel(600). The throttle valves are respectively the reaction gas supplying pipe and the exhaust pipe. The throttle valve connected to the reaction gas supplying pipe is a supply throttle valve and the throttle valve connected to the exhaust pipe is an exhaust throttle valve. The throttle valves control pressure in the chamber by adjusting a flow rate of the reaction gas or the exhaust gas.
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