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发明名称
Method of planarization a semiconductor device
摘要
申请公布号
KR100742961(B1)
申请公布日期
2007.07.25
申请号
KR20010080597
申请日期
2001.12.18
申请人
发明人
分类号
H01L21/3105
主分类号
H01L21/3105
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代理人
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地址
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