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发明名称
METHOD AND SYSTEM FOR ESTABLISHING THE CLEANLINESS OF A DEVICE
摘要
申请公布号
EP1609168(A4)
申请公布日期
2007.07.25
申请号
EP20040758407
申请日期
2004.03.26
申请人
SMITHS DETECTION INC.
发明人
DEBONO, RENO, FRANCIS;CARROLL, JOHN, J.;SANDOR, ROBERT, BRUCE
分类号
H01J49/40;(IPC1-7):H01J49/40
主分类号
H01J49/40
代理机构
代理人
主权项
地址
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