发明名称 HARD COATING FILM
摘要 A hard coating film having improved high-temperature characteristics, and a method for manufacturing the hard coating film are provided. A laminate type hard coating film comprises: a first layer which has a composition represented by the formula, (Cr(1-a)Ala)(C(1-x)Nx), and a thickness of 1 to 80 nm; and a second layer which has a composition represented by the formula, (Zr(1-k)Hfk)(C(1-y)Ny), and a thickness of 1 to 80 nm, the layers being alternately laminated several times, where each subscript indicates the atomic ratio and satisfies the following relations: 0.2<=a<=0.80, 7<=x<=1, 0<=k<=1, and 0.5<=y<=1. A hard coating film has a composition represented by the formula, (Cr(1-p-q-r)AlpZrqHfr)(C(1-z)Nz), where each subscript indicates the atomic ratio satisfying the following conditions with b or c possibly being 0, and q or r possibly being 0: in case of p<0.5: 0.2=0.5: 0.5<=p<=0.7, 0.05<=(q+r)<=0.25, 0.15<=(1-p-q-r), and 0.5<=z<=1.
申请公布号 KR20070077083(A) 申请公布日期 2007.07.25
申请号 KR20070005180 申请日期 2007.01.17
申请人 KABUSHIKI KAISHA KOBE SEIKO SHO 发明人 YAMAMOTO KENJI
分类号 C23C14/00;C23C14/34;C23C28/00 主分类号 C23C14/00
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