发明名称 |
Contactor having LSI-circuit-side contact piece and test-board-side contact piece for testing semiconductor device and manufacturing method thereof |
摘要 |
<p>A contactor (20) is placed between a semiconductor device (6) and a test board (8). A contact electrode (22) of the contactor electrically connects the semiconductor device to the test board. The contact electrode is formed of a conductive layer provided on an insulating substrate (24). The contact electrode comprises a first contact piece (22b1) which contacts a terminal (6a) of the semiconductor device, a second contact piece (22b2) which contacts an electrode (8a) of the test board, and a connecting portion (22a) which electrically connects the first contact piece and the second contact piece. <IMAGE></p> |
申请公布号 |
EP1136827(B1) |
申请公布日期 |
2007.07.25 |
申请号 |
EP20000311458 |
申请日期 |
2000.12.20 |
申请人 |
FUJITSU LIMITED |
发明人 |
MARUYAMA, SHIGEYUKI;MATSUKI, HIROHISA |
分类号 |
G01R1/067;G01R31/26;G01R1/04;G01R1/073;H01L21/66;H01R11/01;H01R33/76;H01R43/00;H05K3/32 |
主分类号 |
G01R1/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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