| 摘要 |
Automated tool recipe verification and correction are disclosed. A tool recipe is intercepted during uploading or downloading of the tool recipe. A determination whether an associated parameter verification set (PVS) template for the tool recipe exists is performed, and if it exists, a determination whether to verify the tool recipe is performed. Each parameters of the tool recipe having an auditable corresponding parameter is compared to the auditable corresponding parameter of the associated PVS template. Where no non-matching parameter sets exist, the tool recipe is verified; otherwise, a determination as to whether of all of the non-matching parameter sets are indicated as modifiable in the associated PVS template is made. If all of the parameters of the non-matching parameter sets are modifiable, then they are modified to match the respective auditable corresponding parameter and the tool recipe is verified, otherwise, the verification is inhibited.
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