METHOD OF MANUFACTURING VERTICAL INORGANIC ALIGNMENT LAYER AND LIQUID CRYSTAL DISPLAY APPARATUS HAVING THE SAME

摘要

A method for forming a vertical inorganic alignment layer and an LCD having the vertical inorganic alignment layer are provided to prevent charges from being accumulated on a boundary surface between a liquid crystal layer and a vertical inorganic alignment layer, by controlling a specific resistance of the vertical inorganic alignment layer through frequency of RF power. An RF power is applied to a plasma generating part(51) attached onto an outer wall of a reactor(50). A substrate is provided within the reactor, and a back bias voltage and heat are applied to the substrate. A discharge gate is injected into the reactor. A vertical inorganic alignment layer(40) is formed on the substrate by controlling frequency of RF power, wherein the vertical inorganic alignment layer has a vertical alignment characteristic and a specific resistance of 10^10-10^15 Фcm.