发明名称 |
SHADOW SCULPTED THIN FILMS |
摘要 |
A method of making vapor deposited thin films by rotating a substrate in the presence of an obliquely incident vapor flux. The substrate may be rotated about an axis normal to the surface of the substrate and/or parallel to the surface of the substrate by two motors mounted with their axes orthogonal to each other. Angle of incidence, measured from the normal to the surface of the substrate, exceeds 80.degree.. Feedback from a deposition rate monitor allows control of rotation speed of both motors to produce a growth with a defined pattern. |
申请公布号 |
CA2182452(C) |
申请公布日期 |
2007.07.24 |
申请号 |
CA19962182452 |
申请日期 |
1996.07.31 |
申请人 |
ROBBIE, KEVIN JOHN;BRETT, MICHAEL JULIAN |
发明人 |
ROBBIE, KEVIN JOHN;BRETT, MICHAEL JULIAN |
分类号 |
G02B1/10;B01D61/14;B81B1/00;C23C14/22;C23C16/44;G02B1/11;G02B5/20;G02B5/30;G02B6/12;G02B6/132;H01L21/203;H01L23/66 |
主分类号 |
G02B1/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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