| 摘要 |
A heater is provided including a plate having a heating surface for heating an object to be heated and a resistance heater element provided in the plate. This resistance heater element includes a continuous wiring pattern including a plurality of flexures and a thermal uniform pattern part which improves thermal uniformity. The continuous wiring pattern includes a plurality of folding parts as the flexures. A first distance between the wirings in a first region of the wiring pattern other than a second region proximate the folding parts is substantially constant, and a second distance between the wirings in the second region is greater than the first distance.
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