| 摘要 |
A scatterometer comprising a source ( 2 ) for providing an incident radiation beam ( 1 ) to be directed to the surface of a sample ( 4 ), and means for directing said incident radiation beam ( 1 ) at different angles towards the surface of the sample ( 4 ). The scatterometer furthermore comprising a screen ( 6 ) for receiving the reflection ( 7 ) of the incident radiation beam ( 1 ), and a camera ( 9 ) for recording the scatter profile ( 7 ) as projected on said screen ( 6 ) by the reflected radiation beam ( 5 ). The scatterometer is provided with means ( 11,12,13,14,15 ) for moving the screen ( 6 ) and thereby keeping it in the reflected radiation beam ( 5 ), and with means for keeping the camera ( 9 ) directed to the moving screen ( 6 ).
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