| 摘要 |
A device for measuring a film thickness is provided to improve the reliability of obtained data by using a light emitting diode having broadband wavelength as a light source. A light source(120) has a light emitting diode for irradiating light onto a semiconductor substrate at a predetermined angle. The light emitted from the light source is polarized by a polarizer(130). A detection part(160) detects the light reflected from the substrate, and verifies the polarized state of the reflected light. A computing part(170) computes a thickness of a film formed on the substrate based on the polarized state.
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