发明名称 |
Monolithic vertical integration of an acoustic resonator and electronic circuitry |
摘要 |
Monolithic devices that include an acoustic resonator vertically integrated with electronic circuitry are described. In one aspect, a monolithic integrated device includes a substrate, electronic circuitry supported by the substrate, an acoustic isolator over the electronic circuitry, and an acoustic resonator on the acoustic isolator. A method of fabricating the monolithic device also is described.
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申请公布号 |
US7248131(B2) |
申请公布日期 |
2007.07.24 |
申请号 |
US20050079776 |
申请日期 |
2005.03.14 |
申请人 |
AVAGO TECHNOLOGIES WIRELESS IP (SINGAPORE) PTE. LTD. |
发明人 |
FAZZIO R. SHANE;DUNGAN THOMAS E. |
分类号 |
H03H9/54;H03H3/02;H03H9/05 |
主分类号 |
H03H9/54 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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