| 摘要 |
A plasma reactor having a plasma chamber connected with a magnetic flux channel is provided to enhance transfer efficiency of inductance coupling energy and maintain plasma stably. A magnetic core(31) forms a magnetic flux channel between magnetic flux openings, and is wound by a magnetic flux induction coil(32). A plasma chamber(20) has a hollow region connected to the magnetic flux channel for generating plasma. The plasma chamber is provided with a gas inlet for introducing a gas into the hollow region and a gas outlet for discharging plasma gas. A power supply source(33) is connected to the magnetic flux induction coil to supply an AC power to it.
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