| 摘要 |
A tray conveyance system is provided to randomly withdraw a desired tray from accommodated trays and to withdraw a workpiece from the withdrawn tray. A tray conveyance system(1) includes three ports(3) to accommodate trays. The tray conveyance system receives a group of accumulated trays conveyed from upstream process, withdraws a desired tray from the group of trays, and conveys a workpiece accommodated in the withdrawn tray to a treatment process installed near the tray conveyance system. The tray as an object of the tray conveyance system includes a bottom part where a plurality of transverse bars are installed in parallel by predetermined distances, a wall part installed around the bottom part, and supports attached to the upper side of the wall part and receiving claws of a lift when the tray is lifted up. A chuck is used as the lift. When the trays are horizontally transported between the ports, the trays are transported on two rows of rollers. In this case, flanges formed on the outer circumference of the wall part of the tray are loaded on the rollers.
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