HINGE APPARATUS AND SEMICONDUCTOR MANUFACTURING EQUIPMENT HAVING THE SAME

摘要

A hinge apparatus is provided to induce a lid to move down even when the lid is temporarily lifted up by the inner pressure difference of a chamber by making a turning member and a connection axis coupled to the turning member move vertically by a predetermined interval while the turning member and the connection axis are inserted into a connection hole of a fixing member. A fixing member(130) is composed of first and second bodies that are separated from each other by a predetermined interval. A turning member(110) is interposed between the first and the second bodies. The fixing member is connected to the turning member by a connection axis(150) that continuously penetrates the fixing member and the turning member. A bearing is interposed between the outer circumferential surface of the connection axis and the inner circumferential surface of the turning member into which the connection axis is inserted so that the turning member can turn with respect to the connection axis. The turning angle of the turning member having turned with respect to the connection axis is maintained by a rotation angle maintaining unit. Connection holes are formed in the first and the second bodies so that one and the other ends of the connection axis are inserted into the connection holes. The connection hole has greater thickness and height than those of the connection axis so that the connection axis can move vertically by a predetermined interval while the connection axis is inserted into the first and the second bodies.