| 摘要 |
A cassette aligning apparatus of ion implantation equipment is provided to more precisely and easily align the wafer received in a cassette by forming a plurality of slots for insertion of a wafer in an end station of ion implantation equipment. A cassette aligning apparatus(200) of ion implantation equipment includes a main body and a slot part(206) wherein the main body has a quadrilateral shape whose bottom side is open. The main body aligns a cassette in an end station of the ion implantation equipment. The slot part is formed on the right and left sidewalls in the main body so that standby wafers in the end station can be inserted into the slot part one by one. A height adjusting part(204) can adjust the height of the main body, capable of being made of a screw.
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