| 摘要 |
A ceiling traveling vehicle system is provided to install more buffers by using left and right sides of a traveling rail for installing the buffers to thereby increase transfer efficiency. A ceiling traveling vehicle system includes a traveling route. The traveling route includes a U-shaped intra bay route in a bay where processing devices are arranged, and an inter bay route contacting the intra bay route. The ceiling traveling vehicle travels in one direction. Side buffers(6,8) are installed at the left and right sides of the traveling rails(10) of the ceiling traveling vehicle. One of the side buffers is a processing device side buffer and the other is an opposite side buffer when viewing at the traveling rails. The traveling rails are suspended to the ceiling of a clean room by columns(11) and include a traveling rail main body(12) and a power supplying rail(13). A travel driving unit(14) is installed in the ceiling traveling vehicle so that the ceiling traveling vehicle travels in the traveling rail main body, electric power is supplied from the power supplying rail to the ceiling traveling vehicle by a power supply(16), and the ceiling traveling vehicle communicates with a system controller.
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