Lateral calibration device and method

摘要

A calibration device and method for lateral force calibration in small force measuring devices such as atomic force microscopes is disclosed. A platform has a substantially planar surface including a slot for accommodating at least part of the AFM cantilever tip, one or more supporting legs arranged to provide sprung resistance to the platform and a capacitive drive means for driving the platform laterally with respect to the AFM cantilever tip.