SYSTEM AND METHOD FOR SUPPLING CHEMICAL

摘要

A system for supplying chemicals is provided to facilitate management and preventive maintenance of a system by reducing the constitution of a chemicals supply system. A chemicals supply apparatus supplies chemicals to a first process chamber(22) and a second process chamber(24) disposed on the first process chamber. The chemicals are transferred from the chemicals supply apparatus to the first process chamber by a first chemicals supply line(120). The chemicals are transferred from the chemicals supply apparatus to the second process chamber by a second chemicals supply line(140). The supply pressures of the chemicals supplied to the first and second process chambers are the same. The chemicals supply apparatus can include a storage receptacle(114) for storing chemicals. An inert gas is supplied to the storage receptacle to pressurize the storage receptacle.