发明名称 PIVOT ASSEMBLY AND WAFER TRANSFER HAVING THE SAME
摘要 A pivot assembly and a wafer transfer device having the same are provided to prevent connection between a bearing and a gear from being loose by integrally forming a pivot arm connection and the gear with the bearing. A lower cap(23) has a body(29) positioned under an upper cap(21) and extensions(31,32) extending from the body. The lower cap and the upper cap are joined by a joining member. A bearing(35) is interposed between a lower portion of an edge of the upper cap and upper surfaces of the extensions at a sidewall of the lower cap. A pivot assembly has a pivot arm connection(37) and a gear(39) which are integrally formed with the bearing. The bearing has an inner race(35a) and an outer race(35b) which are in contact with the upper and lower caps, respectively.
申请公布号 KR20070076325(A) 申请公布日期 2007.07.24
申请号 KR20060005551 申请日期 2006.01.18
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK, SUNG KWANG
分类号 H01L21/68 主分类号 H01L21/68
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