| 摘要 |
The invention is based on an apparatus and a method for scanning specimens ( 1 ) using an optical imaging system ( 3 ) and a scanning stage ( 2 ), images of the specimen ( 1 ) being acquired by means of a camera ( 4 ), and/or measurements on the specimen ( 1 ) being made by means of an optical measurement device ( 5 ), at specimen points X<SUB>p</SUB>, Y<SUB>p</SUB>. For that purpose, the scanning stage ( 2 ) is calibrated by obtaining and storing height values Z at different calibration positions X, Y of the scanning stage ( 2 ), and thereby generating a running height profile of the scanning stage ( 2 ). For the scanning of specimens ( 1 ), the specimen height positions Z<SUB>p </SUB>at specimen points X<SUB>p</SUB>, Y<SUB>p </SUB>are determined by means of a reference height Z<SUB>ref </SUB>of the specimen ( 1 ) together with the running height profile of the scanning stage ( 2 ). While each specimen point X<SUB>p</SUB>, Y<SUB>p </SUB>is being traveled to with the scanning stage ( 2 ) the relevant specimen height position Z<SUB>p </SUB>is already being set, so that running errors of the scanning stage ( 2 ) are compensated for and image acquisitions or measurements are possible immediately upon reaching the specimen point X<SUB>p</SUB>, Y<SUB>p</SUB>.
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