FOCUSED-BEAM ELLIPSOMETER

摘要

A focused-beam ellipsometer is provided to relatively improve measuring precision and the drive speed of an optical detector by remove errors of rotation of optical parts and signal noises of motor vibration. A focused-beam ellipsometer includes light source(110), a light source unit module(120), a beam splitter(130), an objective lens(140), a light-receiving unit module(160), an optical detector(170), and an operation processing unit(180). The light source unit module has a linear polarizer linear-polarizing light emitted from the light source. The beam splitter splits the polarized light from the light source unit module. The objective lens illuminates some of the light from the beam splitter to a sample. The light-receiving unit module receives the reflected light from the sample. The optical detector detects the light received by light-receiving unit module to pixels. The operation processing unit compensates the strength of the light detected by the optical detector.