| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inkjet printing system which can form a thin film of uniform profile and uniform thickness and a manufacturing method using the same. <P>SOLUTION: The inkjet printing system according to the embodiment 1 of the invention includes a stage on which a substrate is mounted, a head unit for dropping ink onto the substrate, a drying unit for drying the ink dropped onto the substrate and a transporting apparatus for moving the head unit and the drying unit to a predetermined position and preferably a vacuum hole is formed in the drying unit. Accordingly in the inkjet printing system according to the embodiment 1 of the invention and the manufacturing method using the same, the ink is dried by utilizing the vacuum hole and a heater at the same time to attain rapid drying of the ink. <P>COPYRIGHT: (C)2007,JPO&INPIT |
