摘要 |
PROBLEM TO BE SOLVED: To increase a capacitance of a storage capacitance as well as a light-shielding performance and to achieve high-quality display in an electro-optical device such as a liquid crystal device. SOLUTION: The liquid crystal device includes, on a TFT array substrate 10, data lines 6a and scanning lines 3a extending as crossing each other, a pixel electrode 9a disposed in each pixel defined corresponding to the data line 6a and the scanning line 11a in a plan view on the TFT array substrate 10, and a TFT 30 electrically connected to the pixel electrode 9a. Further, the device has a storage capacitor 70 which is disposed in a region including a region opposing to the channel region 1a' of the TFT 30 in a plan view on the TFT array substrate 10 and disposed in an upper layer side than the TFT 30 and which comprises a lower electrode 71 made of a polysilicon film, a dielectric film 75 and an upper electrode 300a made of a metal film successively layered from the lower side, as well as is electrically connected to the pixel electrode 9a. COPYRIGHT: (C)2007,JPO&INPIT |