发明名称 |
Method for high precision printing of patterns |
摘要 |
The present invention includes a method to print patterns with improved edge acuity. The method for printing fine patterns comprises the actions of: providing an SLM and providing a pixel layout pattern with different categories of modulating elements, the categories differing in the phase of the complex amplitude.
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申请公布号 |
US2007165098(A1) |
申请公布日期 |
2007.07.19 |
申请号 |
US20040557099 |
申请日期 |
2004.06.14 |
申请人 |
MICRONIC LASER SYSTEMS AB |
发明人 |
SANDSTROM TORBJORN;MARTINSSON HANS |
分类号 |
B41J2/47;G03F7/20 |
主分类号 |
B41J2/47 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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