发明名称 PFETS and methods of manufacturing the same
摘要 In a first aspect, a first method of manufacturing a PFET on a substrate is provided. The first method includes the steps of (1) forming a gate channel region of the PFET having a first thickness on the substrate; and (2) forming at least one composite source/drain diffusion region of the PFET having a second thickness greater than the first thickness on the substrate. The at least one composite source/drain diffusion region is adapted to cause a strain in the gate channel region. Further, significantly all of the at least one composite source/drain diffusion region is below a bottom surface of a gate of the PFET. Numerous other aspects are provided.
申请公布号 US2007166890(A1) 申请公布日期 2007.07.19
申请号 US20060335763 申请日期 2006.01.19
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHENG KANGGUO;HSU LOUIS L.;MANDELMAN JACK A.;YANG HAINING
分类号 H01L21/84 主分类号 H01L21/84
代理机构 代理人
主权项
地址