发明名称 Method and apparatus for simulating electrostatic discharge events in manufacturing and calibrating monitoring equipment
摘要 In some embodiments, a method and apparatus for simulating electrostatic discharge events in manufacturing and calibrating monitoring equipment are presented. In this regard, a device is introduced to simulate an ESD event by discharging a stored charge and measuring in situ the quantity of charge discharged. Other embodiments are also disclosed and claimed.
申请公布号 US2007164747(A1) 申请公布日期 2007.07.19
申请号 US20050317755 申请日期 2005.12.23
申请人 INTEL CORPORATION 发明人 MALONEY TIMOTHY J.
分类号 F02P17/00 主分类号 F02P17/00
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