SUSPENSION MECHANISM FOR HIGH PERFORMANCE ACCELEROMETERS

摘要

A suspension diaphragm (16) is configured to support a precision transducer (14) within a container (12). The suspension diaphragm (16) is buttressed by an underlying compliant preform (152) and an annular hybrid support (16B) disposed along the periphery of an opening of the container (12). The transducer (14) is affixed to the suspension diaphragm (16) using the compliant preform (152) and rigid epoxy in the securing channels (120). The annular hybrid support (16B) is affixed to the exterior of the container (12).